An electron probe micro-analyzer (EPMA) is a microbeam instrument used primarily for the in situ non-destructive chemical analysis of minute solid samples. It is fundamentally the same as an Scanning Electron Microscopy (SEM), with the added capability of chemical analysis. The primary importance of an EPMA is the ability to acquire precise, quantitative elemental analyses at very small “spot” sizes (as little as 1-2 microns). The spatial scale of analysis makes it possible to analyze geological materials in situ and to resolve complex chemical variation within single grains.

JEOL JXA-8350F HyperProbe

The JEOL JXA-8530F electron probe microanalyzer (EPMA) is equipped with a Schottky field emission gun designed for in-situ quantitative microanalyses at high spatial resolution (< 1 μm). The instrument is equipped with 5 WDS spectrometers using LIF, PET, TAP, LDE1 and LDE2 crystals, including 7 large crystals (3 TAPL, 3 PETL, and 1 LDE1L) for maximum sensitivity. All chemical elements from B to U can be analyzed. The instrument is also equipped with an SDD EDS detector (spectral resolution of 129 eV on Mn) and a panchromatic CL detector.

The laboratory equipment is completed by an Ar ion cross section polisher for high-end surface preparation.


Prof. Lukas Baumgartner

Head of the EMPA lab
+41 (0)21 692 44 46

Dr. Martin Robyr

EMPA lab manager
+41 (0)21 692 44 41

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